Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method

In this work, we address the simulation and testing of MEMS micromirrors with hardening softening behaviour excited patches piezoelectric materials. The forces exerted by are modelled means theory ferroelectrics developed Landau–Devonshire based on experimentally measured polarisation hysteresis loops. large rotations experienced mirrors also induce geometrical nonlinearities in formulation up to cubic order. solution proposed model is performed discretising device geometry using Finite Element Method, resulting system coupled differential equations solved Harmonic Balance Method. Numerical results were validated experimental data collected devices.